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一种基于微环腔辅助干涉的Fano谐振器

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本文提出并研究了一种基于微环腔辅助干涉的Fano谐振器.在该谐振干涉结构中,输入信号光经环形谐振腔后分成的下路光和直通路光以一定相位差合束,该合束光干涉形成了有别于传统对称Lorentz线型的非对称陡峭Fano光谱.在理论上使用传输矩阵方法分析了非对称线型产生的相位条件,讨论了不同耦合系数、微环损耗对非对称谱线的消光比和斜率的影响,给出了理想条件下谷点波长漂移的计算公式和完全消光条件.分析表明,当两路光信号相位差为94°时,对于耦合系数为0.242、损耗系数为0.995的Fano谐振谱消光比可高达41.54 dB,斜率可高达2372 dB/nm.基于时域有限差分(FDTD)仿真和设计,采用电子束光刻(EBL)直写器件在绝缘层上硅(SOI)平台上进行了验证.实验中两路光的合束采用了多模干涉(MMI)结构,并设计了不同相位差以验证其对Fano谐振非对称线型的影响.实验表明,在本文工艺条件下,可以获得近-25 dB的消光比和1997 dB/nm的光谱斜率.本文提出的Fano谐振结构将为高分辨率光传感、低功耗光开关和高对比度光探测等领域高性能器件的设计开辟新途径.
A Fano Resonator Based on Microring Cavity-Assisted Interference
Objective We aim to explore a novel optical resonator that diverges from the traditional symmetric Lorentzian line shape in optical cavities.Instead,an asymmetric Fano spectral line is produced to exhibit significant intensity variations with wavelength changes.This distinctive feature of Fano resonance with the sharp and asymmetric line profile has a high potential for applications in sensitive sensors,photodetection,and low-power optical switches.The principle behind its application in sensing is based on changes in the surrounding environment of the sensors,which alters the effective refractive index of the waveguide.This alteration causes a shift in the transmission spectral line,leading to substantial changes in the output light intensity at the working wavelength.The sensitivity of resonant sensors is characterized by the steepness of the transmission spectral line's slope.A steeper slope indicates greater changes in light intensity for the same spectral line drift,thereby enhancing the sensor's detection sensitivity.Therefore,the Fano resonance with the capacity for high sensitivity finds broad applications and catches research attention from various fields.In recent years,optical devices with Fano characteristics have been extensively studied.Examples include the metal-insulator-metal(MIM)waveguide structure with branched resonators and square ring open resonators.By varying the branch height,the geometric dimensions of the open rings,and the symmetry of the structure,the Fano resonance's transmission characteristics are altered to yield high sensitivity up to 1500 nm/RIU and a quality factor exceeding 1800.Another example is the MIM waveguide structure with concentric double ring resonators,where a maximum sensitivity of 1400 nm/RIU and a quality factor of 1380 are obtained.We propose the research methodology in this paper involves a comprehensive approach combining theoretical analysis and experimental validation,and utilizes a dual-path interference structure within a microring cavity to create the Fano resonator.Methods We employ the transfer matrix method to analyze the phase conditions that lead to the generation of an asymmetric spectral line.This method is instrumental in understanding how various parameters influence the shape of the asymmetric spectral lines in the Fano resonator.Meanwhile,it allows for an in-depth examination of the phase conditions responsible for creating the distinctive asymmetric line profile of the Fano resonance.The design and analysis of the device modal patterns are conducted by adopting the finite difference-time domain(FDTD)method.This method is pivotal in determining the modal distribution and behavior of the device in different operational conditions and is helpful for device parameter fine-tuning to achieve the desired optical characteristics.The device is fabricated on a silicon-on-insulator(SOI)platform using electron beam lithography(EBL)etching technology.This technology is chosen for its precision and ability to create finely structured optical components,essential for the accurate realization of the Fano resonator.Following fabrication,the device's features are characterized to validate the theoretical predictions.This involves testing the device in various conditions to observe its performance and confirm the theoretical models.The combination of these theoretical and experimental methods provides a robust framework for us.The proposed innovative Fano resonator structure opens new avenues for the design of high-performance devices in applications such as high-resolution optical sensing,low-power optical switches,and high-contrast optical detection.Results and Discussions The theoretical framework utilizing the transfer matrix method allows for an in-depth analysis of the phase conditions leading to the asymmetric line shape of the Fano resonance.The results show that for a coupling coefficient of 0.242,a loss coefficient of 0.995,and a phase difference of 94° between the two light paths,the Fano resonance spectrum can achieve an extinction ratio as high as 41.54 dB and a spectral slope as steep as 2372 dB/nm.These theoretical predictions are significant as they indicate the potential of the Fano resonator to yield high performance in optical applications.The research also provides formulas for calculating the wavelength shift at the spectral dip and conditions for complete extinction under ideal circumstances.These calculations are crucial for predicting and fine-tuning the resonator's performance in practical applications.For device fabrication and validation,the experimental part involves fabricating the devices on an SOI platform using EBL.A multi-mode interference(MMI)structure is employed for combining the two light paths with varying phase differences to observe their effects on the asymmetric line shape of the Fano resonance.The experimental results are highly encouraging,demonstrating an extinction ratio of nearly-25 dB and a spectral slope of 1997 dB/nm in the described process conditions.Meanwhile,they nearly align with the theoretical predictions,revealing the practical viability of the proposed resonator design.The successful demonstration of the Fano resonator with such high-performance metrics underscores its potential in high-resolution optical sensing,low-power optical switches,and high-contrast optical detection.Additionally,we highlight the ability of this resonator-interferometer structure to manipulate the light phase and power distribution,opening new pathways for integrated optoelectronics.Finally,we conclude by emphasizing the Fano resonator's superior performance in sensing capabilities,highlighting its applicability in nanobiological sensing and densely integrated nanophotonic devices.Conclusions We successfully propose,analyze,design,and validate a new type of Fano resonator assisted by a micro-ring cavity.This resonator exhibits a sharp,asymmetric Fano resonance,and a notable deviation from traditional resonator designs.A crucial finding is the ability to effectively control the spectral symmetry and slope by adjusting the phase difference between two light beams within the resonator.This capability to manipulate the spectral features is pivotal for various applications.Meanwhile,we observe that the spectral line shape of the Fano resonance is sensitive to phase noise,which plays a significant role in determining the resonator's performance and potential applications.The experimental results show an impressive extinction ratio of up to-25 dB and a spectral slope of 1997 dB/nm,marking an improvement of nearly 20 dB in extinction ratio compared to traditional microring resonators in similar process and coupling conditions.The spectral line characteristic study reveals that the Fano resonator possesses excellent sensing capabilities.The resonator's structure is highly suitable for applications in nanobiological sensing and densely integrated nanophotonic devices,highlighting its broad applicability in various fields of optical technology.Additionally,this shows its potential in advancing the design of high-performance devices in fields including high-resolution optical sensing,low-power optical switches,and high-contrast optical detection.

resonant cavityFano resonancemicroringsensing

李柯、陈佳豪、魏潇、陈露、程培红、王卓远、周裕鸿、喻平、金婧、练斌

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宁波工程学院电子与信息工程学院,浙江 宁波 315211

浙大宁波理工学院信息科学与工程学院,浙江 宁波 315100

谐振腔 Fano共振 微环 传感

浙江省自然科学基金浙江省自然科学基金宁波市2025重大科技专项宁波市2025重大科技专项国家自然科学基金国家自然科学基金红外物理国家重点实验室开放课题浙江省教育厅科研项目铁电压电材料与器件湖北省重点实验室开放课题

LY21F040004LY20F0500062020Z0212021Z1096140517761972350SKLIP2021006Y202147586K202106

2024

光学学报
中国光学学会 中国科学院上海光学精密机械研究所

光学学报

CSTPCD北大核心
影响因子:1.931
ISSN:0253-2239
年,卷(期):2024.44(11)