光学与光电技术2024,Vol.22Issue(1) :103-110.

基于Preston原理的平面抛光仿真研究

A Simulation Study of Plane Polishing Based on Preston's Principle

韩雨芯 李宏 牛恒 郑坤 宋炫宇
光学与光电技术2024,Vol.22Issue(1) :103-110.

基于Preston原理的平面抛光仿真研究

A Simulation Study of Plane Polishing Based on Preston's Principle

韩雨芯 1李宏 2牛恒 1郑坤 1宋炫宇1
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作者信息

  • 1. 西安工业大学光电工程学院,陕西西安 710021
  • 2. 西安工业大学光电工程学院,陕西西安 710021;陕西省薄膜技术与光学检测重点实验室,陕西西安 710021
  • 折叠

摘要

为解决传统平面单摆抛光过于依赖人工经验导致加工效率低等问题,基于Preston原理建立工件与磨盘不同相对位置时工件特征点的材料去除函数,研究工件速度场分布对平面面形的影响规律;将工件面形栅格化处理,建立工件速度场分布、磨盘速度场分布模型,利用MATLAB仿真工件相对磨盘摆动时工件特征点的速度场变化与材料去除量的关系.采用单因素实验验证方法,固定工件摆幅为0.35 rad,摆速为0.09rad/s,摆角范围为[0.49rad,2.79 rad],进行仿真验证.结果表明,工件各特征点摆动路径的速度场差异越大,工件表面面形精度越高,为快速找到最优加工工艺参数,有效提高平面加工效率提供了新的思路和方法,同时对提高平面光学元件面形精度的抛光加工工艺有着借鉴意义.

Abstract

In order to solve the problem of low processing efficiency due to the over-reliance on manual experience in traditional planar mono-pendulum polishing,the material removal function of workpiece feature points at different relative positions of workpiece and grinding disc is established based on the Preston's principle,and the influence law of workpiece velocity field distribution on planar surface shape is studied.The surface shape of the workpiece is rasterised.The velocity field distribution of the workpiece and the velocity field distribution of the grinding disc are modelled,and the relationship between the velocity field changes at the workpiece's characteristic points and the amount of material removed is simulated using matlab when the workpiece oscillates relative to the grinding disc.A single-factor experimental validation method was used,with a fixed workpiece pendulum amplitude of 0.35 rad,a pendulum speed of 0.09 rad/s and a range of pendulum angles of[0.49 rad,2.79 rad],for simulation validation.The results show that the greater the difference in the velocity field of the oscillation path of each feature point of the workpiece,the higher the surface accuracy of the workpiece,which provides a new idea and method to find the optimal processing parameters quickly and improve the efficiency of plane processing effectively.

关键词

Preston原理/单摆抛光/速度场仿真/平面/自动化

Key words

Preston's principle/single pendulum polish/velocity field simulation/plane/automation

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出版年

2024
光学与光电技术
华中光电技术研究所 武汉光电国家实验室 湖北省光学学会

光学与光电技术

CSTPCD
影响因子:0.351
ISSN:1672-3392
参考文献量12
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