In order to achieve high-precision and efficient detection of the imaging quality of transmissive elements,a method for measuring wavefront aberration of lens to be tested based on the entrance pupil center of camera using phase measuring deflectometry(PMD)is proposed in this paper.The basic principles of PMD for wavefront aberration measurement in both forward and reverse ray-tracing models based on the camera's entrance pupil center are described.The simulation measurements of wavefront aberrations for a plano-convex lens and a telephoto lens are conducted using ZEMAX software respectively.The simulation results indicate a close agreement between the wavefront aberrations calculated through forward and reverse ray-tracing models,validating the feasibility of the proposed method.In experiments,the wavefront aberrations of a plano-convex lens and a custom-built telephoto lens are measured,and the measurement results are compared with those obtained from interferometer.The discrepancies between the proposed method and the interferometer are found to be RMS=46.7 nm,PV=92.3 nm for the plano-convex lens,and RMS=126.9 nm,PV=112.5 nm for the telephoto lens,respectively.The results demonstrate that the measurement outcomes of the proposed method agree well with those obtained from interferometer.
维普
万方数据