变间隙F-P干涉仪的形变对光谱结果的影响分析
Analysis of the Influence of Variable Gap F-P Interferometer Deformation on Spectral Results
王红勇 1岳松 2赖建军 3胡栋 1马浩然 3宫文峰 1阙俊1
作者信息
- 1. 华中光电技术研究所—武汉光电国家研究中心,湖北武汉 430223
- 2. 华中光电技术研究所—武汉光电国家研究中心,湖北武汉 430223;华中科技大学—武汉光电国家研究中心,湖北武汉 430074
- 3. 华中科技大学—武汉光电国家研究中心,湖北武汉 430074
- 折叠
摘要
传统的傅里叶红外光谱成像设备(FTIR)所用的干涉仪体积较大,变间隙法布里-珀罗干涉仪(F-P干涉仪)以其小体积紧凑型的优点解决了传统FTIR设备的小型化问题.但由于变间隙F-P干涉仪内部光学镜片在安装时需要将镜片紧密贴合在一起,其紧固力可能对镜片局部施加力使得镜片产生形变,从而影响所得到的光谱数据的精确度.以某型基于变间隙F-P干涉仪的红外成像光谱设备为例,通过Zygo激光干涉仪测量F-P干涉仪镜片在紧固后的受力形变,建立干涉仪形变仿真模型.通过仿真模型分析,明确了 F-P干涉仪的形变会导致光谱响应强度和波长准确度的下降,为后续对F-P腔的结构优化设计指明了方向.
Abstract
The interferometer used in traditional Fourier Transform Infrared Spectroscopic Imaging(FTIR)equipment is large in size,and the Variable Gap Fabry Perot interferometer(F-P interferometer)solves the problem of miniaturization of the traditional FTIR equipment with the advantage of its small size and compactness.However,because the internal optical lenses of the F-P interferometer need to be tightly fitted together during installation,the fastening force may locally exert force on the lenses,causing deformation of the lenses and thus affecting the accuracy of the spectral data obtained.Taking a certain type of infrared imaging spectroscopy equipment based on a variable gap F-P interferometer as an example,the deformation of the F-P interferometer lens is measured by a Zygo laser interferometer,and a simulation model of the deformation of the interferometer is established.Through the analysis of the simulation model,it is clarified that the deformation of the F-P interferometer will lead to the degradation of the spectral response intensity and wavelength accuracy,which points out the direction for the subsequent structural optimization design of the F-P cavity.
关键词
光谱/红外/干涉仪/F-P腔/光学形变Key words
spectroscopy/infrared/interferometry/F-P cavities/optical deformation引用本文复制引用
出版年
2024
NETL
NSTL
万方数据