首页|光学元件微缺陷偏振检测的图像处理方法研究

光学元件微缺陷偏振检测的图像处理方法研究

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光学元件表面缺陷会严重影响到光学系统的性能指标.现有的光学元件表面缺陷检测技术存在检测速度慢,精度低等问题.基于光学元件微缺陷偏振检测技术,研究了缺陷偏振成像的数字图像处理方法.首先利用光的偏振特性采集到缺陷对比度高的图像,然后通过滤波去噪、阈值分割、形态学处理的方法对图像进行预处理,再根据不同的缺陷类型选取不同的特征参数从而实现缺陷检测及分类,此外还精确测量了缺陷的尺寸.结果表明,此方法的缺陷总检出率为 95.90%,单张图像检测时间少于 50 ms.
Image processing method for polarization detection of microdefects in optical components
Surface defects of optical components seriously affect the performance of optical systems.The existing surface defects detection technology of optical components has problems such as slow detection speed and low accuracy.This paper studies the digital image processing method of polarization imaging of defects based on the polarization detection technology of micro-defects of optical components.Firstly,we used the polarization property of light to capture the image with high contrast of defects,and then pre-processed the image by filtering and denoising,threshold segmentation,morphological processing.Next,different feature parameters are selected according to different types of defects so as to achieve defect detection and classification,meanwhile accurately measuring the size of defects.The results showed that the total defect detection rate of this method was 95.90%,and the detection time of a single image was less than 50 ms.

defect detectiondigital imageoptical componentpolarization characteristic

陈晓辉、王鑫森、段亚凡

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泉州师范学院 光子技术研究中心,福建 泉州 362000

福建省先进微纳光子技术与器件重点实验室,福建 泉州 362000

福建省超精密光学工程技术与应用协同创新中心,福建 泉州 362000

缺陷检测 数字图像 光学元件 偏振特性

2024

光学仪器
中国仪器仪表学会 上海光学仪器研究所 中国光学学会工程光学专业委员会

光学仪器

影响因子:0.432
ISSN:1005-5630
年,卷(期):2024.46(5)