Laser-induced periodic surface structures characterization of SiC and its spatiotemporal imaging
Femtosecond lasers enable high-precision,truly three-dimensional micro-and nanoscale fine processing.Laser-induced periodic surface structures(LIPSS)is a significant research focus in the field of femtosecond laser micro-nano fabrication.During the LIPSS induction process,the parameters of the pump pulses affect both the morphological characteristics and the periodicity of the structures.Therefore,research on processing techniques under various experimental conditions,along with analysis of transient phenomena during the process,has become essential in this field.In this study,a femtosecond processing-imaging system is developed to investigate the formation characteristics of LIPSS on SiC surfaces.We analyzed the effects of pulse number,laser fluence,and laser polarization state on the final morphology of LIPSS on SiC surfaces.Additionally,using femtosecond pump-probe technology,we imaged the spatiotemporal dynamics of LIPSS formation on SiC surfaces.The results showed that,at a single pulse fluence of 1.01 J/cm2,the LIPSS structure began to emerge 5 ps after the third pulse impact and progressively deepened with increasing pulse numbers.This study on SiC contributes to a deeper understanding of the physical mechanisms involved in LIPSS formation,optimizes processing parameters,and advances SiC-related application research.
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