Design of a pressure-adjustable active piston gas flow standard device
With the rapid evolution of Micro-Electro-Mechanical Systems(MEMS),gas microflow me-ters have been widely utilized in various fields such as environmental monitoring,biomedicine,fine chemicals,semiconductors,and renewable energy.However,some instruments possess characteristics of a broad measurement range,high accuracy,and significant pressure loss,which pose challenges for conventional gas flow standards.Through an analytical comparison of existing gas flow standard devices,this study highlights that piston-type gas flow standard devices are more suitable for the metering of high-precision,high-pressure-loss gas flow meters.Based on this,a pressure-adjustable active piston gas flow standard device is designed in this paper.The device features a parallel configuration of three pistons with capacities of 20 ml,200 ml,and 3 000 ml,enabling a stable output flow rate ranging from 1 to 3 000 mL/min.Additionally,it adopts a horizontal cylindrical dual-piston design with balance and mete-ring chambers,achieving an adjustable working pressure range of 0 to 500 kPa.Furthermore,two detec-tion modes,namely constant pressure and constant flow,are designed to meet the metering requirements of high-pressure-loss microflow meters based on different principles.
active pistonhorizontal cylindrical double-pistonstandard devicepressure-adjustabledesign plantesting plan
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