Temperature Control Algorithm of Heating Wire in Molecular Beam Source Furnace
During the operation of molecular beam source furnace,the internal temperature experienced interference from various factors,which resulted in a decrease in temperature control precision and stability,affecting the beam quality.The conventional PID control has the adverse parameter setting,and results in poor performance,because the temperature change of the source furnace has hysteresis and nonlinearity.To address these issues,this paper proposes a compound temperature control algorithm.By combining genetic algorithm with variable domain fuzzy control and PID,adjust the scale factor of the variable domain in the fuzzy PID control process based on variable domain theory,thus achieving adaptive adjustment of PID control parameters.Moreover,genetic algorithm is used to optimize the initial parameters of PID control,which enhances the self-tuning capability of PID control.The experimental results on the source furnace equipment demon-strate that the algorithm has strong adaptive ability,short adjustment time,and achieves a control accuracy of 0.1℃.
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