Design and Application of CVD Rotary Furnace for Si/O Negative Electrode
Based on the preparation process of Si/O negative electrode by CVD method,the equipment production capacity,heating power,and driving power were theoretically calculated.The structure of the inlet/outlet was designed.And a design and application of CVD rotary furnace for Si/O negative electrode were proposed.The production test shows that the CVD rotary furnace designed in this case can meet the mass production of Si/O negative electrode,providing a solution for the lithium battery industry to prepare Si/O negative electrode by CVD method.