Aluminum nitride ceramics are the main substrate commonly used in thin film circuits.Common product categories include thin film resistors,thin film power dividers,thin film attenuators,through hole thin film circuits,etc.Among them,resistors are one of the major categories.For thin film resistors,power resistance is an important parameter.Endurance usually refers to two types of power:DC power and RF power.However,due to the large frequency range and multiple parameter influences of RF,endurance generally refers to the power tested under DC conditions,which is the instantaneous voltage and instantaneous current product when the resistor is burned out by conducting the positive and negative electrodes of the resistor to the positive and negative poles of the power supply,adjusting the voltage size,and applying it for a certain period of time.The most important indicators for through-hole thin film circuits are usually the precision of line gap width and the laser processing accuracy of holes,which have a significant impact on the microwave performance of the product.Ceramics are generally divided into polished state,Sintered state,and ground state,and the surface state of ceramics directly affects the appearance and quality of thin film circuit products.
关键词
薄膜工艺/氮化铝陶瓷制备/粗糙度/线缝宽精度/表面状态
Key words
thin film process/preparation of aluminum nitride ceramics/roughness/precision of line gap width/surface condition
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