Determination of High Concentration Mixed Acids of Semiconductor by Near Infrared Spectroscopy Combined with Water Replenishment Technique
The innovative technique of Water Replenishment was combined with near infrared spectroscopy(NIR)for the rapid determination of the content of each component in the high concentration mixed acids used in the semiconductor etching process,and the determination of one sample can be completed within 1 min and the results of the content of each component can be given at the same time.The experiment significantly reduced the corrosiveness of the sample by adding an appropriate amount of ultrapure water to the high concentration mixed acid samples,ensuring that the sample was loaded into an optical glass tube within 1 min without a significant corrosion reaction,i.e.,a large number of continuous bubbles in the glass tube due to the strong corrosion.The added ultrapure water was not involved in any calculations and does not affect the results of the components.This solution cleverly utilized the water replenishment technique and was suitable for the detection of high concentration mixed acid samples.
high concentration mixed acidsNIRwater replenishment technique
万方数据
维普
