首页|基于硅MEMS技术的高灵敏度微型光纤法布里-珀罗压力传感器

基于硅MEMS技术的高灵敏度微型光纤法布里-珀罗压力传感器

扫码查看
基于微机电系统技术设计制备了一种微型化光纤法布里-珀罗传感器,具备高灵敏度和可批量制造的特点.传感器内部的法珀腔由刻蚀后的SOI晶圆与BF33玻璃阳极键合而成,传感器敏感膜片采用了绝缘衬底上的单晶硅材料.采用激光精细切割技术对传感器单元进行独立分离,使得单个传感器的整体外径仅为400 μm,高度为220 μm.在此基础上,搭建了信号解调实验平台,并对传感器的感压特性进行了详尽测试.测试结果显示,在 0~50 kPa的压力范围内,传感器的压力灵敏度可达到18.5 nm/kPa,最大非线性度为0.47%,重复性为0.18%,迟滞为0.18%.此外,该传感器具有体积小、灵敏度高、电磁兼容、生物兼容以及稳定性强等优点,在生物医学和医疗领域具备巨大的商业转化价值.
High Sensitivity Micro Fiber Fabry Perot Pressure Sensor Based on Silicon MEMS Technology
Micro pressure sensors play a crucial role in pressure measurement in narrow spaces,especially in the medical field.Traditional pressure sensors are limited in small space applications due to their large size.The advantages of miniaturized pressure sensors are highlighted.The measurement of pressure within the organism during clinical diagnosis and minimally invasive surgery can provide doctors with necessary diagnostic information,decision support,and guidance for treatment.Real time monitoring of internal pressure is a key factor in determining the success or failure of treatment,especially in cardiovascular surgery,head injury recovery,and urological intervention.With the development of Micro Electro Mechanical Systems(MEMS)technology and the improvement of medical standards,various types of miniaturized pressure sensors have begun to enter the field of biology,including electronic pressure sensors and fiber optic sensors.Electronic sensors,including piezoelectric,resistive,and capacitive pressure sensors,have complex structures and are not resistant to electromagnetic interference,which limits their applications in the medical field.Compared with traditional electronic sensors,fiber optic sensors have received widespread attention due to their small size,simple structure,high sensitivity,corrosion resistance,and resistance to electromagnetic interference.At present,most of the reported fiber optic sensors are based on fiber Bragg grating and Fabry Perot.The core component of fiber optic Fabry Perot sensors is the Fabry Perot cavity,and its preparation process is mainly divided into manual single preparation and MEMS technology batch preparation.Single prepared sensors are produced in one go,with poor consistency and difficulty in mass production.By contrast,the MEMS technology can not only improve sensor consistency but also reduce costs to achieve large-scale production.A micro fiber optic Fabry Perot sensor based on MEMS technology is designed and prepare.The sensor has the characteristics of high sensitivity and batch manufacturing.Based on the research of biocompatible materials,Silicon-On-Insulator(SOI)and BF33 glass were selected as sensor sensitive materials on insulating substrates.The etched SOI device layer is made of monocrystalline silicon as a sensitive membrane,and the etching depth is used as the initial cavity length of the micro Fabry Perot cavity.It is then bonded together with BF33 glass through anodic bonding technology to form a vacuum sealed micro Fabry Perot cavity array on the bonding surface.Monocrystalline silicon and BF33 glass form two reflective surfaces in a miniature Fabry Perot cavity.The incident light enters the cavity and undergoes double beam interference.When the external pressure changes,the sensitive membrane deforms,resulting in a change in the length of the Fabry Perot cavity.The signal is transmitted to the demodulation system through optical fibers to determine the change in external pressure.By using femtosecond laser fine cutting technology to independently separate the sensor unit,and using a micro displacement platform under a microscope to integrate the fiber and sensor head,the overall outer diameter and the high of a single sensor is only 400 μm and 220 μm,respectively.We built a signal demodulation experimental platform and conducted detailed tests on the pressure characteristics of the sensor.The test results show that within the gas pressure range of 0~50 kPa,the pressure sensitivity of the sensor can reach 18.5 nm/kPa,with a maximum nonlinearity of 0.47%,a repeatability of 0.18%,a hysteresis of 0.18%,and a small cross sensitivity coefficient within the range of human temperature changes.In summary,the sensor designed and prepared in this paper with advantages such as small size,high sensitivity,electromagnetic compatibility,biocompatibility,and strong stability,provide enormous commercial conversion value in the fields of biomedical and medical science.

Fiber optic sensorsFabry-PerotMiniaturizationPressure measurementMEMS

李文豪、贾平岗、王军、薛波、万顺、侯凯耀、熊继军

展开 >

中北大学 仪器与电子学院 省部共建动态测试技术国家重点实验室,太原 030051

光纤传感器 法布里-珀罗 微型化 压力测量 微机电系统

国家自然科学基金国家科技重大专项山西省科技创新人才团队专项

51935011J2019?V?0015?0110202204051001016

2024

光子学报
中国光学学会 中国科学院西安光学精密机械研究所

光子学报

CSTPCD北大核心
影响因子:0.948
ISSN:1004-4213
年,卷(期):2024.53(5)
  • 24