Process and Corrosion Resistance of Aluminum Film Prepared by Magnetron Sputtering on NdFeB Magnet
The aluminum films were deposited on NdFeB Magnet by Magnetron Sputtering.The structure and corrosion resistance of aluminum film after different sputtering power,time and chemical conversion treatment were analyzed by SEM,XRD and salt spray corrosion test.The results show intermediate layer and surface of the aluminum film have compact structure,and the film/substrate interface is smooth.Increasing the sputtering power and prolonging the sputtering time appropriately can increase the thickness of the aluminum film,in company with the surface roughness and density of the film.The deposited aluminum film has good corrosion resistance and can provide effective protection for NdFeB magnets.Chemical conversion treatment can make the surface of aluminum film more compact and further improve the corrosion resistance of aluminum film
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