微柱状CsI闪烁转换屏的制备和表征
Fabrication and Performance of Micro-columnar CsI Scintillator Screens
胡亚华 1张敏 2刘思 3黄世明3
作者信息
- 1. 嘉兴南湖学院机电工程学院,嘉兴 314001
- 2. 嘉兴学院数据科学学院,嘉兴 314001
- 3. 同济大学物理科学与工程学院,上海 200092
- 折叠
摘要
闪烁转换屏是X射线成像探测器的重要组成部分,微柱状的闪烁转换屏可以提高X射线成像探测器的空间分辨率.采用周期为 4 μm、孔深为 100 μm的微孔硅阵列作为基底模板,热氧化得到二氧化硅反射层后,再通过真空熔融压力注入法填充CsI获得了具有周期结构的微柱状闪烁转换屏,研究了真空度、注入压力、加压时间对硅孔内 CsI微柱形貌的影响.结果表明:真空度 10-2 Pa、注入压力6 MPa、加压时间30 min时,可以有效消除CsI微柱中存在的气泡,得到均匀、连续、致密的微柱状闪烁转换屏.X射线衍射和激发发射谱展示了制备的微柱状像素化CsI闪烁转换屏具有优异的结晶性和发光性能.刃边法测得制备的微柱状CsI闪烁转换屏空间分辨率可达 97 lp/mm.
Abstract
The scintillator screen is an important part of the X-ray imaging detector,and the structuralized scintillator screen could improve the spatial resolution of the X-ray imaging detector.In this paper,using silicon as a base template,the CsI scintillator screens were manufactured by the vacuum melting pressure method.The prepared CsI scintillator screens were analyzed and characterized by scanning electron microscopy,X-ray diffraction and X-ray excitation emission spectra.The experimental conditions of preparation were investigated,including injection pressure,time and vacuum.The results show that the vacuum is 10-2 Pa,the injection pressure is 6 MPa and time is 30 min,which can effectively eliminate the bubbles in the micro-column,obtain uniform,continuous and dense morphology structure.The micro-column is the CsI of cubic crystal system,and has(110)preferred orientation;The spatial resolution of the prepared CsI scintillator screens were measured by edge method.The results showed that the resolution was 97 lp/mm.
关键词
CsI闪烁转换屏/真空熔融压力注入/X射线成像/空间分辨率Key words
CsI scintillator screen/vacuum melting pressure method/X-ray imaging/spatial resolution引用本文复制引用
基金项目
国家自然科学基金(11905122)
浙江省教育厅一般科研项目(Y202352041)
浙江省清洁能源与碳中和重点实验室开放基金(204022023006A)
嘉兴市科技计划项目(2021AY10057)
嘉兴南湖学院重点科研项目(N41472001-70)
出版年
2024
NETL
NSTL
万方数据