Effect of discharge parameters on the characteristics of hollow cathode discharge in oxygen
In order to explore the effect of discharge parameters on the discharge characteristics of hollow cathode in oxygen,the hollow cathode discharge in oxygen is simulated by using a fluid model.The discharge process contains 11 particles and 48 reactions.The effects of pressure and voltage on discharge characteristics such as electric potential,electric field,average electron energy,and particle density are investigated.The results show that pressure and voltage have important effects on plasma parameters in discharge.With the increase of pressure,the area of the negative glow region expands,the radial electric field in the cathode sheath increases,the peak average electron energy in the cathode sheath decreases,the hollow cathode effect weakens,the peak density of electrons,O2+ions,active particles O,O2(a1 △g),O(1D)increases.The change of three active particles in the negative glow region exhibit different trends of change with pressure.The proportion of electrons in negative particles increases with increasing of pressure.As the voltage increases,the negative glow region gradually separates,the electric field intensity and electron energy in the cathode sheath increases.The peak density of electrons and O2 ions,the proportion of electrons in negative particles gradually increases,the density peak gradually separates,the hollow cathode effect weakens.The active particles also increase with pressure.The results also indicate that the influence of voltage on the hollow cathode effect is weaker than that of pressure.
hollow cathode dischargeoxygen dischargenumerical simulationpressure and voltage