High sensitivity capacitive flexible pressure sensor based on ionic membrane
In order to meet the needs of precise measurement of subtle human physiological signals,by adopting polyvinyl alcohol and potassium hydroxide as the materials,and combined with sandpaper re-verse mold technology,this paper produces a kind of high sensitivity flexible capacitive pressure sen-sor with microstructured composite ionic membrane dielectric layer.The production process of the sensor is described,the chemical characteristics of the ionic membrane are characterized,and the die-lectric layer material ratio and microstructure size are analyzed and optimized.Then,the static and dynamic characteristics of the sensor are tested,and the sensor is applied to the human fingertip pulse wave measurement.The results show that the sensor has high sensitivity(8.29 kPa)and fast re-sponse time(45 ms).The sensor is installed in the finger clamp,and the pulse wave measurement sys-tem realizes the accurate measurement of the human fingertip pulse,which provides a new choice for the wearable medical electronic devices.