合肥工业大学学报(自然科学版)2024,Vol.47Issue(9) :1170-1175.DOI:10.3969/j.issn.1003-5060.2024.09.003

基于离子膜的高灵敏电容式柔性压力传感器

High sensitivity capacitive flexible pressure sensor based on ionic membrane

刘平 汪晓佳 刘彩霞 田合雷 徐宝华 张恩灿
合肥工业大学学报(自然科学版)2024,Vol.47Issue(9) :1170-1175.DOI:10.3969/j.issn.1003-5060.2024.09.003

基于离子膜的高灵敏电容式柔性压力传感器

High sensitivity capacitive flexible pressure sensor based on ionic membrane

刘平 1汪晓佳 1刘彩霞 1田合雷 1徐宝华 2张恩灿2
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作者信息

  • 1. 合肥工业大学微电子学院,安徽合肥 230601
  • 2. 国网安徽省电力有限公司滁州供电公司,安徽滁州 239000
  • 折叠

摘要

针对精确测量微小人体生理信号的需求,文章采用聚乙烯醇、氢氧化钾为材料,结合砂纸倒模技术,制作一种具有微结构复合离子膜介电层的高灵敏柔性电容式压力传感器.详细阐述传感器制作流程,表征离子膜的化学特性,分析并优化介电层材料配比及微结构尺寸,在对传感器静态和动态特性进行测试后将之应用于人指尖脉搏波测量.结果表明,基于离子膜微结构介电层的柔性电容式传感器具有高灵敏度(8.29 kPa-1)和快速响应时间(45 ms),将该传感器安装到手指夹具中,通过脉搏波测量系统即可实现对人指尖脉搏的精确测量.该研究为可穿戴医疗电子设备提供了一种新的选择.

Abstract

In order to meet the needs of precise measurement of subtle human physiological signals,by adopting polyvinyl alcohol and potassium hydroxide as the materials,and combined with sandpaper re-verse mold technology,this paper produces a kind of high sensitivity flexible capacitive pressure sen-sor with microstructured composite ionic membrane dielectric layer.The production process of the sensor is described,the chemical characteristics of the ionic membrane are characterized,and the die-lectric layer material ratio and microstructure size are analyzed and optimized.Then,the static and dynamic characteristics of the sensor are tested,and the sensor is applied to the human fingertip pulse wave measurement.The results show that the sensor has high sensitivity(8.29 kPa)and fast re-sponse time(45 ms).The sensor is installed in the finger clamp,and the pulse wave measurement sys-tem realizes the accurate measurement of the human fingertip pulse,which provides a new choice for the wearable medical electronic devices.

关键词

压力传感器/电容式/离子膜/微结构/高灵敏

Key words

pressure sensor/capacitive/ionic membrane/microstructure/high sensitivity

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出版年

2024
合肥工业大学学报(自然科学版)
合肥工业大学

合肥工业大学学报(自然科学版)

CSTPCD北大核心
影响因子:0.608
ISSN:1003-5060
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