Micro-nano processing of high precision Ω type radiation structure
The uniformity and accuracy of microwave radiation structure are the direct factors affecting the sensitivity of diamond solid-state spin quantum state control experiments,so it is particularly im-portant to prepare microwave radiation structure with high precision and good uniformity by micro-nano processing.Based on the simulation of CST MWS software Ω slotline model,this paper proposes a new micro-nano processing flow through optical exposure and magnetron sputtering micro-nano pro-cessing method to complete the physical preparation with high precision pattern size and dense and u-niform metal layer radiation structure.The radiation structure has been verified by quantum regula-tion of Rabi oscillation experiment.In the experiment,under the condition that the input current power is about 1 W,Rabi oscillation with a frequency of about 14.2 MHz appears at the frequency point of 2.8 GHz,and the radiation structure generates an alternating magnetic field with an effective size of about 7.17 X 10-4 T along the projection direction of the section plane of the NV axis.Com-pared with the traditional electrochemical copper plating method,the micro-nano processing proposed in this paper can greatly reduce the step flow,effectively improve the graphic accuracy and uniformity of radiation structure,and better meet the needs of quantum precision measurement experiments.
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