Progress in the Determination of Trace Phosphorus Content in the Intermediate Product Chlorosilane Produced from Electronic Grade Polysilicon
In the process of producing electronic grade polysilicon by modified Siemens process,the intermediate products of rectification are fed into a polysilicon reduction furnace to produce polysilicon by hydrogen reduction of chlorosilane,Various forms of phosphorus in chlorosilane as donor impurities have great influence on the quality of electronic grade polysilicon products.This paper systematically expounds the detection methods and research progress of trace phosphorus content in chlorosilane,an intermediate product of electronic grade polysilicon production,and compares the advantages and disadvantages of various impurity detection methods of trace phosphorus content in chlorosilane to provide reference for daily detection.
NETL
NSTL
万方数据
维普
