In the process of low temperature test of chips,liquid nitrogen is required for temperature change test.Due to the strict requirements for the flow rate and pressure of liquid nitrogen during the testing process,the entire liquid nitrogen supply system should be strictly controlled from a design perspective.This paper briefly discusses the design,equipment selection and material selection of liquid nitrogen supply system in current chip testing building.
关键词
芯片低温测试/液氮系统/系统设计
Key words
low temperature testing of chips/liquid nitrogen system/system design