Analysis of Key Points in Design and Manufacturing of Silicon Powder Filters
As one of the key equipment in the production of polysilicon,the silicon pow-der filter can effectively intercept fine silicon powder in the production pro-cess and purify the feed gas and the recycled process gas.This paper compre-hensively introduces the working principle and structural characteristics of the silicon powder filter,and elaborates in detail on the selection of filtering materials,the design of seals,and the key points in the design of key struc-tures and components.Meanwhile,it is required to strictly control the manu-facturing process of silicon powder filtering equipment,so as to provide refer-ences for the design and manufacture of similar products.
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