硅粉过滤器设计和制造要点分析
Analysis of Key Points in Design and Manufacturing of Silicon Powder Filters
李刚 1董鹏 1郭齐 1尤超 1张立峰1
作者信息
- 1. 西部宝德科技股份有限公司,陕西 西安 710201
- 折叠
摘要
硅粉过滤器作为多晶硅生产的关键设备之一,能够有效拦截生产过程中的细硅粉,净化原料气和循环的工艺气体.本文全面地介绍了硅粉过滤器的工作原理和结构特点,并对过滤材料选择、密封件设计和关键结构及部件的设计要点进行了详细阐述,同时,要求严格控制硅粉过滤设备制造环节,为同类产品的设计和制造提供参考.
Abstract
As one of the key equipment in the production of polysilicon,the silicon pow-der filter can effectively intercept fine silicon powder in the production pro-cess and purify the feed gas and the recycled process gas.This paper compre-hensively introduces the working principle and structural characteristics of the silicon powder filter,and elaborates in detail on the selection of filtering materials,the design of seals,and the key points in the design of key struc-tures and components.Meanwhile,it is required to strictly control the manu-facturing process of silicon powder filtering equipment,so as to provide refer-ences for the design and manufacture of similar products.
关键词
多晶硅/硅粉过滤器/设计/制造Key words
polysilicon/silicon powder filter/design/manufacture引用本文复制引用
出版年
2024
NETL
NSTL
万方数据