Experimental Study on the Quality Improvement of Polysilicon Efflux Powder
In this paper,the impurity composition of the silica powder was determined by washing with hydrochloric acid,hydrofluoric acid,hydrofluoric acid + nitric acid,respectively,using the cold hydrogenated silica powder as raw material.The impurity composition of the silica powder was determined as metal chloride,silicon dioxide,acid insoluble substances,metal impurities,etc.According to the composition of the silica powder,the silica powder was improved and purified by pure water ultrasonic treatment,hydrochloric acid washing and hydrofluoric acid washing.The treated silica powder was reacted with hydrogen chloride gas at 350℃in a tubular furnace,and the quality of the silica powder was characterized by the reaction conversion rate.The experimental results show that the reaction conversion rate of the silica powder is increased by about 3%after pure water ultrasonic treatment,and the maximum reaction conversion rate can be increased by about 15%after further pickling and purification.
NETL
NSTL
万方数据
