Research on Stress Relieving of 316L Stainless Steel Welds in Polycrystalline Silicon Reduction Furnace Based on Ultrasonic Shock Treatment
The ultra-clean requirement for electronic-grade polycrystalline silicon production make certain methods,such as ultrasonic impact treatment(UIT),which reduces surface residual stress,unsuitable because the treatment may result in surface pits,burrs,and other defects that could accumulate dirt and retain water.This study investigates the influence of post-UIT polishing to remove surface defects on the introduced residual compressive stress.The results indicate that UIT can effectively transform residual tensile stress in the weld seam into compressive stress,and high-intensity UIT and high coverage UIT achieve similar effects in introducing stress.The removal of surface defects through polishing has little impact on residual stress.For the reduction furnace of polycrystalline silicon,post-UIT polishing can be applied to improve the resistance to stress corrosion cracking.
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