用PDHID检测器分析高纯氦气中微量氧和氩的方法研究
A Technique for Analyzing Trace Amounts of Oxygen and Argon in High-Purity Helium Using a PDHID Detector
钟庚1
作者信息
- 1. 广东量化检测技术有限公司,广东佛山 528225
- 折叠
摘要
针对高纯氦气中微量氧和氩的检测问题展开探讨.在高纯氦气技术指标中,氧和氩的总含量已经足够,但许多生产单位仍需了解氧和氩的具体含量,以便调整生产工艺.为满足这一需求,本研究提出一种PDHID检测器的新型分析方法.首先,采用5阀6柱的装置,对高纯氦气进行总含量的测试;其次,对微量氩进行单独检测.最后,通过计算总含量与氩含量之差,获得氧的含量.这种方法不仅能够为高纯气体分析提供新的标准,还可以有效弥补传统检测技术的不足.此外,通过对不同种类高纯气体进行分析,有助于进一步优化和改进检测方法,提高其应用价值.
Abstract
In this paper,the detection of trace oxygen and argon in high purity helium was discussed.In the technical indicators of high purity helium,the total content of oxygen and argon is sufficient,but many production units still need to know the specific content of oxygen and argon in order to adjust the production process.In order to meet this demand,a new analysis method of PDHID detector is proposed in this study.Firstly,the total content of high purity helium is measured by a device with 5 valves and 6 columns.Secondly,the trace amount of argon is detected separately.Finally,the oxygen content is obtained by calculating the difference between the total content and the argon content.This method can not only provide a new standard for high purity gas analysis,but also effectively make up for the shortcomings of traditional detection techniques.In addition,through the analysis of different kinds of high purity gases,it is helpful to further optimize and improve the detection method,and increase its application value.
关键词
PDHID检测器/高纯氦气/氧/氩Key words
PDHID detector/high purity helium/oxygen/argon引用本文复制引用
出版年
2024
NETL
NSTL
万方数据