Current status and research progress of purification technology of electronic grade phosphoric acid
As a kind of ultra-high purity chemical reagent,electronic grade phosphoric acid is mainly used for chip cleaning and etching in the microelectronics industry,and its purity will significantly affect the yield,electrical performance and reliability of electronic components.However,high-end electronic grade phosphoric acid with extremely low impurities(10-9 level)has extremely high requirements for chemical separation and purification technology.Based on the application of electronic grade phosphoric acid in chip cleaning and etching,the main domestic and foreign standards of electronic grade phosphoric acid products are reviewed,and the main analysis and monitoring methods of impurity ions are summarized.The preparation and purification methods of electronic phosphoric acid are reviewed,especially the significant advantages of crystallization in purifying phosphoric acid.Finally,the prospect of purification technology of electronic phosphoric acid is prospected.
万方数据
维普
