Analysis and Suggestion on Reliability Evaluation Standards of MEMS Devices
This paper studied and summarized the failure mode and failure mechanism of MEMS devices.Based on its mode and failure mechanism,the reliability test items and related test standards of MEMS devices are analyzed,and the current status of reliability test is summarized.Finally,in view of the above situation,some suggestions are put forward for the construction and improvement of the standard system for reliability testing of MEMS devices,and the prospects are discussed.
万方数据
维普
