首页|PIND内腔高度测试方法的优化与应用

PIND内腔高度测试方法的优化与应用

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粒子碰撞噪声检测(PIND)方法的试验条件主要是根据元器件内腔高度来确定的.为了确保内腔高度的准确性,本文基于X射线成像技术在半导体检测中的应用,研究了X射线穿透成像机理,以及射线灯丝长期工作对测量尺寸的影响.通过元器件实际外形尺寸和X射线标记尺寸的比例关系,对传统的内腔高度测量方法进行了优化;在此基础上,开发了一款内腔高度计算软件,搭建一个无需X射线标注,无需人工计算的软件平台.同时,平台能够根据实际内腔高度来匹配试验条件,控制振动台的激振状态,为受试元器件提供基本为正弦的运动,提高了PIND试验的准确性和效率.本方法以其高效、精确、易用的特点,将在电子元器件检验检测领域发挥越来越重要的作用.
Optimization and Application of Inner Cavity Height Testing Method in PIND Test of Components
The test conditions for the Particle Impact Noise Detection(PIND)method are primarily determined by the cavity height of the components.To ensure the accuracy of the cavity height,this paper,based on the application of X-ray imaging technology in semiconductor inspection,studied the mechanism of X-ray penetration imaging and the impact of long-term operation of the X-ray filament on measurement dimensions.By analyzing the proportional relationship between the actual external dimensions of the components and the dimensions marked by X-rays,the traditional cavity height measurement method was optimized.On this basis,a cavity height calculation software was developed,establishing a software platform that does not require X-ray marking or manual calculation.At the same time,the platform can match the test conditions according to the actual cavity height,control the excitation state of the vibration table,and provide a motion that is essentially sinusoidal for the tested components,thereby improving the accuracy and efficiency of the PIND test.With its characteristics of high efficiency,precision,and ease of use,this method will play an increasingly important role in the field of electronic component inspection and testing.

particle impact noise detectioninternal cavity heightx-ray

褚昆、席善斌、杨振宝、张欢、张魁、赵海龙

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河北北芯半导体科技有限公司,石家庄 050200

国家半导体器件质量检验检测中心,石家庄 050200

粒子碰撞噪声检测 内腔高度 X射线

2024

环境技术
广州电器科学研究院有限公司

环境技术

CSTPCD
影响因子:0.995
ISSN:1004-7204
年,卷(期):2024.42(12)