Study on numerical method of leakage characteristics of ceramic wafer seal
The leakage characteristics of ceramic wafer seal were analyzed theoretically,and a numerical calculation method of leakage characteristics of ceramic wafer seal considering clearance leakage and contact leakage was proposed.On the basis of verifying the accuracy of the numerical method,the flow field,the self-sealing effect and leakage characteristics of ceramic wafer seal under working conditions were studied by analyzing the influence of inlet and outlet pressure ratio and temperature on the closing force,flow factor and leakage,revealing the changing rule of self-sealing effect and clarifying the leakage mechanism of ceramic wafer seal.The results showed that the sealing force of ceramic wafer seal increased with the increase of inlet and outlet pressure ratio,and the self-sealing effect was enhanced.The radial closing force was higher than the tangential closing force.Air flow had little influence on the tangential closing force of ceramic wafer seal,while the radial closing force decreased gently with the increase of air flow temperature,and the radial self-sealing effect was weakened accordingly.The leakage of ceramic wafer seal increased with the increase of inlet-outlet pressure ratio and decreased with the temperature rise,and the gap leakage played a major role in the leakage system.The numerical method proposed can accurately calculate the leakage of ceramic wafer seals,providing a theoretical basis for the analysis of leakage characteristics of ceramic wafer seal.