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激光回馈精密测量技术及应用

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介绍了激光回馈干涉的理论模型,阐述了激光回馈测量灵敏度高、装置结构简单、可自准直、能够对非合作目标进行精密测量的技术特点.探讨了激光回馈测量技术在工业和科研领域中的应用方向,包括位移、角度、振动、绝对距离测量等,指出利用倍频复用、频率复用、偏振复用、全程准共路等技术可提高回馈测量的应用性能.分析了激光回馈测量相较传统干涉测量的优势,展望了激光回馈测量技术在科学研究、工业生产、精密制造等领域的应用前景,提出通过提高光源稳频精度、研究不同光回馈水平下的实验现象和理论模型、探索新型激光器的回馈效应等方式,进一步提升激光回馈干涉仪的灵敏度和测量性能.
Laser feedback precision measurement and applications
The theoretical model of laser feedback interferometry was introduced,and the technical characteristics of laser feedback measurement such as high sensitivity,simple device structure,self-aligning,and the ability to achieve pre-cise measurements of non-cooperative targets were explained.Various applications of laser feedback measurement in in-dustrial and research domains were explored,including displacement measurement,angle measurement,vibration mea-surement,and absolute distance measurement.It is pointed out that the use of structures like harmonic reuse,frequency reuse,polarization reuse,and full-path coherent combining can enhance the application performance of feedback measure-ment.The advantages of laser feedback measurement compared to traditional interferometric measurement methods were discussed,as well as their application prospects in scientific research,industrial production,and precision manufacturing.Methods such as improving the frequency stability accuracy of light sources,studying experimental phenomena and theo-retical models at different levels of optical feedback,and exploring feedback effects of new lasers were proposed to further enhance the sensitivity and measurement performance of laser feedback interferometers.

precision measurementlaser feedbackself-mixing interferometryhigh sensitivity

谈宜东、彭程

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清华大学 精密仪器系 精密测试技术及仪器国家重点实验室,北京 100084

精密测量 激光回馈 自混合干涉 高灵敏度

国家重点研发计划国家重点研发计划

2020YFC22002042020YFC2200101

2024

计测技术
中国航空工业集团公司北京长城计量测试技术研究所

计测技术

影响因子:0.31
ISSN:1674-5795
年,卷(期):2024.44(1)
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