摘要
介绍了目前露点温度传感器领域的研究现状,阐述了光学式、谐振式、电学式、热学式、重量式、化学式露点温度传感器的原理及构造,指出光学式露点温度传感器测量精度极高,其中冷镜式露点仪可作为湿度计量标准;谐振式露点温度传感器具有体积小、成本低、响应时间短、灵敏度高、可靠性好的特点;电学式露点温度传感器灵敏度高、功耗小,便于实现小型化、集成化;重量法是准确度最高的湿度绝对测量方法;化学法常用来测量低湿环境下的有机混合气体.探讨了露点温度传感器在环境监测、工业制造、医疗诊断等领域的应用情况,指出未来露点温度传感器将会向高精度、高稳定性、高响应的方向发展,且应用范围将进一步拓展,以满足极端环境下的测量需求.
Abstract
Introducing the current research status in the field of dew-point temperature sensors,and expounding the principles and structures of optical,resonant,electrical,thermal,weight and chemical dew-point temperature sensors.It is pointed out that the optical dew point temperature sensor has high measurement accuracy,and the cold mirror dew point sensor can be used as the humidity measurement standard.The resonant dew point temperature sensor has the characteris-tics of small size,low cost,short response time,high sensitivity and good reliability.The electrical dew point temperature sensor has high sensitivity and low power consumption,which is convenient for miniaturization and integration.Gravimetric method is the most accurate absolute humidity measurement method and the basis for establishing humidity benchmark.Chemical methods are often used to measure organic gas mixtures in low humidity.The application of dew point tempera-ture sensor in environmental monitoring,industrial manufacturing,medical diagnosis and other fields is discussed.It is pointed out that dew point temperature sensors will develop towards high precision,high stability and high response in the future,and their application range will be further expanded to meet the measurement needs in extreme environments.
基金项目
国家计量技术基础项目(十四五)(JSJL2022601A001)
NETL
NSTL
万方数据