基于栅格节距中心峰值检测的扫描探针显微镜校准方法
SPM calibration method based on peak detection of lattice pitch centers
石俊凯 1陈晓梅 1万宇 2霍树春 1姜行健 1李冠楠 1周维虎1
作者信息
- 1. 中国科学院微电子研究所,北京 100029
- 2. 航空工业北京长城计量测试技术研究所,北京 100095
- 折叠
摘要
为了解决扫描探针显微镜(Scanning Probe Microscope,SPM)现有校准方法复杂程度高且存在局限性的问题,提出了一种基于二维标准微尺度正交栅格的SPM校准方法,通过对扫描获取的栅格图像进行互相关/卷积(Cross-correlation/Convolution,CC)滤波,实现对栅距中心坐标的峰值检测.校准的运动几何误差包括x轴和y轴位置偏差Δx和Δy、沿x轴和y轴扫描的直线度偏差δy和δx以及两轴之间的正交性偏差γxy.根据x轴和y轴扫描像素数、扫描范围、标准栅格计量检定节距平均值、栅距平均值计算得出校准因子Cx和Cy.采用标称节距为10 μm的正交栅格样板对原子力显微镜(Atomic Force Microscope,AFM)进行校准实验,结果显示Cx和Cy分别为0.925和1.050,γxy为0.015°,该台AFM的校准扩展不确定度为0.33 μm(k = 2.56).研究成果对于推动SPM校准标准文件的具体实施和执行具有积极意义,并为SPM仪器研制及性能评估提供了技术参考.
Abstract
To address the complexity and limitations of existing calibration methods for Scanning Probe Microscope(SPM),this article proposed a novel SPM calibration method by using a 2D micro-scale orthogonal lattice standard and peak detection(PD)method of the pitch center coordinates based on cross-correlation/convolution(CC)filtering of raster-scanned images.The geometric errors of motion include positional deviations Δx and Δy,straightness deviations δy and δx along x-axis and y-axis respectively,and the orthogonality deviation γxy between the two axes.The calibration factors Cx and Cy were calculated based on the number of pixels scanned on the x-axis and y-axis,scanning range,average pitch of standard grid metrology verification,and average grid spacing.Through case study,an AFM was calibrated using an or-thogonal lattice standard with a nominal pitch of 10 μm,resulting in Cx and Cy values of 0.925 and 1.050,respectively,and an orthogonal deviation γxy of 0.015°.The expanded uncertainty of calibration for this AFM was 0.33 μm(k = 2.56).This SPM calibration method will promote the implementation and execution of SPM calibration standard documents,and has technical reference value for the development and performance evaluation of SPM instruments.
关键词
扫描探针显微镜/原子力显微镜/运动几何误差/校准和测量/栅格节距中心Key words
SPM/AFM/motion geometric error/calibration and measurement/lattice pitch center引用本文复制引用
基金项目
国家重点研发计划(2022YFB3207104)
出版年
2024
NETL
NSTL
万方数据