In order to solve the problems of deformation failure and low sensitivity of flexible thin-film thermo-couples,a thermoelectric sensing model was established and thermal-electrical-force multi-field coupling simulations of flexible thin-film thermocouples were performed.Based on the results,the structural dimensions of the sensor were opti-mized,and a process method for optimizing the sensitivity by heat treatment was proposed,so as to prepare a thermoelec-tric Indium Tin Oxide-Platinum(ITO-Pt)thin-film temperature sensor based on polyimide substrate with high reliability and high sensitivity.The calibration test experiment proves that the sensor sensitivity reaches 40.10 μV/℃,which can ef-fectively meet the temperature testing requirements of human wearable devices and lithium battery health monitoring.
关键词
温度传感器/柔性器件/薄膜热电偶/热处理/灵敏度
Key words
temperature sensors/flexible devices/thin film thermocouples/heat treatment/sensitivity
万方数据