Study on Surface Characteristics and Subsurface Damage of RB-SiC/Si by Laser Ablation
RB-SiC/Si has the advantages of high specific stiffness,good chemical stability,low thermal expansion coefficient and wear resistance,etc.Therefore,it is widely applied in large aperture space telescopes,satellite remote sensing,aviation engine components,and so on.However,the material characteristics of high strength and hardness also make it difficult to be machined.Characterized of high energy density,Laser processing is suitable for hard and brittle materials but it always leads to surface thermal damage.In this paper,the influence of laser parameters on the surface characteristics of RB-SiC/Si was investigated,and the interaction between the nanosecond laser pulse and RB-SiC/Si was analyzed.The high-temperature oxidation process and the oxidation product were identified.The subsurface damage of the laser ablated single groove and groove groups were investigated and compared by angle polishing to achieve the dependence on the laser processing parameters.The achieved results can provide certain theoretical and technical support for precision machining of RB-SiC/Si with low surface and subsurface damage.
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