激光烧蚀反应烧结碳化硅表面形貌特征及亚表面损伤研究
Study on Surface Characteristics and Subsurface Damage of RB-SiC/Si by Laser Ablation
张全利 1刘建 1孙智源 2吴明涛 3蔡毅斌 1曾加恒 1金锃阳 1傅玉灿1
作者信息
- 1. 南京航空航天大学,江苏 南京 210016
- 2. 航空工业沈阳飞机工业(集团)有限公司,辽宁 沈阳 110850
- 3. 四川省精密超精密加工工程技术研究中心,四川 成都 610200
- 折叠
摘要
反应烧结碳化硅(RB-SiC/Si)因具有耐高温、耐腐蚀、比刚度高、热膨胀小、耐磨等优点而广泛应用于大口径空间望远镜、卫星遥感、航空发动机零部件等领域.然而高强度高硬度的材料特性,也导致反应烧结碳化硅呈现出难加工的特点.激光束加工具有能量密度高、加工范围广等特点,适用于加工硬脆材料,但同时也存在表面热损伤严重的缺点.本文研究了激光参数对反应烧结碳化硅加工表面形貌特征的影响,分析了纳秒激光与反应烧结碳化硅之间的作用机理.在反应烧结碳化硅烧蚀产物分析基础上确定了高温氧化过程及氧化产物类型.通过角度抛光法研究激光加工单沟槽产生的亚表面损伤,以及激光加工沟槽组之间产生的大尺寸亚表层损伤,建立了激光加工参数与亚表面损伤深度间映射关系.本文的研究成果可为反应烧结碳化硅的高效精密低损伤加工奠定理论基础和提供技术支持.
Abstract
RB-SiC/Si has the advantages of high specific stiffness,good chemical stability,low thermal expansion coefficient and wear resistance,etc.Therefore,it is widely applied in large aperture space telescopes,satellite remote sensing,aviation engine components,and so on.However,the material characteristics of high strength and hardness also make it difficult to be machined.Characterized of high energy density,Laser processing is suitable for hard and brittle materials but it always leads to surface thermal damage.In this paper,the influence of laser parameters on the surface characteristics of RB-SiC/Si was investigated,and the interaction between the nanosecond laser pulse and RB-SiC/Si was analyzed.The high-temperature oxidation process and the oxidation product were identified.The subsurface damage of the laser ablated single groove and groove groups were investigated and compared by angle polishing to achieve the dependence on the laser processing parameters.The achieved results can provide certain theoretical and technical support for precision machining of RB-SiC/Si with low surface and subsurface damage.
关键词
纳秒脉冲激光/RB-SiC/Si/材料去除机理/表面特征/亚表面损伤Key words
nanosecond pulsed laser/RB-SiC/Si/material removal mechanism/surface characteristic/subsurface damage引用本文复制引用
出版年
2024
国家科技期刊平台
NSTL
万方数据