Abstract
Processing microchannels inside laminated aluminum nitride high-temperature co-fired ceramics(AlN HTCC)packaging,a typical difficult-to-cut ceramic,can effectively solve the heat-dissipation problem of integrated chips used in smart skin.In order to improve the processing effi-ciency and quality of AlN,the machinability of AlN after laser chemical milling(LCM)was studied through the milling force,machined surface quality,surface defects,formation mechanism,and tool wear.This study established a milling force model that can predict the milling forces of AlN and anal-yses the reasons for the improvements in the milling force based on experimental data and predicted data.The results from the model and experiments demonstrated that the milling force of the laser chemical milling assisted micro milling(LCAMM)decreased by 85％-90％and 85％-95％,respec-tively,due to the amount of removal of a single edge was more uniform and the actual inclination angle increased during the cutting process in LCAMM.Moreover,the machined surface quality improved by 65％-76％after LCM because of less tool wear,fewer downward-propagating cracks generated during each feed,and the surface removal mode transformed from intergranular fracture to transgran-ular fracture,which effectively reducing tool wear and improving tool life.Finally,when feed per tooth and depth of cut were 0.4 μm/z and 5 μm,the optimal machined surface quality was obtained,with a roughness of 64.6 nm Therefore,milling after LCM can improve the machinability of AlN and pro-viding a feasibility for the high-quality and efficient machining of microchannels.
维普
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