Laser shaping research based on MEMS deformable mirror
The MEMS deformable mirror is applied for the study of laser beam rectification technology,and the theoretical model of flat-top beam shaping is firstly established.The effect of Gaussian beam shaping with different beam waist radii and divergence angles on the shaping of flat-top beam is analyzed by simulating the Gaussian beam shaping through the focused optical field of the near-axis lens and using the Collins generalized diffraction integral formula.The optical path experiment of flat-top beam shaping based on deformable mirrors is designed,and the theoretical model of flat-top beam shaping and Zernike's polynomial formula are used to obtain the driving voltage of each MEMS deformable mirror and realize the distribution of flat-top beam shaping light field.In the research and analysis of laser shaping based on MEMS deformable mirrors,the beam spot analysis of the shaped flat-top beam is carried out by using the wavefront sensor,and the experimental results of flat-top beam shaping based on deformable mirrors are obtained.The experimental results and the theoretical simulation are compared and analyzed.The experimental results are basically consistent with the theoretical simulation law,and ideal experimental results are obtained.
flat-top beamMEMS deformation mirrorlaser beam shapingbinding radiusdivergence angleZernike's polynomial formula
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