Application of TRIZ Method in Improving Flow Heat Field of PECVD Equipment
PECVD is an important equipment in the process of solar cell processing,and the uniformity of the internal heat flow field has a great influence on the uniformity of the film on the surface of the solar cell.In this paper,TRIZ(Invention problem Solving theory)is used to analyze the heat flow field of PECVD equipment,and TRIZ can be used as an important supplement for fluid simulation.At the same time,it is pointed out that the problem of flow heat field not only involves the conductivity disadvantages,utilization disadvantages and flow partion disadvantages,but also involves the disadvantages of uneven concentration,uneven pressure and low use efficiency.It is suggested to summarize the previous solutions and incorporate them into the TRIZ flow related knowledge system to help engineers solve similar problems.
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维普
