The Finite Element Calculation and Analysis of Micro-vibration of a FAB Plant Structure
In order to study the structural design method of electronic plant against micro-vibration,this paper carries out the site environmental vibration measurement of the plant,and analyzes the micro-vibration level of the semiconductor plant using finite element software.The results found that:the vibration prediction of each area on the second floor of the plant meets the micro-vibration requirements of VC-B and VC-C standards;the vibration peaks of each measurement point are mainly concentrated in the vicinity of the three frequency bands of 2 Hz,12.5 Hz and 25 Hz.The analysis and prediction results can provide experience for similar projects and guide the structural design.
finite element simulationenvironmental vibrationelectronic plants
万方数据
维普
