首页|纳米氧化锌粒子薄膜的场效应载流子迁移率特性的研究

纳米氧化锌粒子薄膜的场效应载流子迁移率特性的研究

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将纳米氧化锌粒子制备纳米膜,研究其场效应性能与载流子迁移性能.通过在有机溶剂介质中热分解油酸锌配合物,合成出尺寸均匀的六方相氧化锌纳米晶粒子.以沉积了铝钛氧化物层与铟锡氧化物层的玻璃为载体,通过旋涂工艺将纳米氧化锌粒子涂覆于其表面,制备出场效应薄膜晶体管.通过工艺优化,制成的半导体纳米氧化锌薄膜晶体管具有优异的可控结构及致密分布的氧化锌纳米晶体,表现出优异的场效应性能与载流子迁移性能.这种直接由氧化锌纳米晶制备的薄膜晶体管具有非毒性、好的透明性以及优越而稳定的场效应半导体器件性能.该技术可高效,便利且低成本大批量地制备氧化锌薄膜晶体管,便于后续在电子等领域的应用.
Field-effect mobility property of synthesized zinc oxide nanoparticles thin film
We have synthesized the uniform-sized hexagonal zinc oxide nanoparticles by thermolysis of Zn-oleate complex in organic solvent.By using the ATO/ITO/glass as the substrate,field-effect thin film transistors were fabricated via spin-coating the zinc oxide nanoparticles on ITO layer surface.The thin-film semiconductors of zinc oxide with well-controlled and densely packed nanocrystals,prepared by optimizing fabrication condition,exhibited superior field-effect and carrier mobility.The thin film transistors fabricated by directly using the zinc oxide nanoparticles also demonstrated non-toxic,transparent,and stable field-effect semiconductor performances.This approach of fabricating zinc oxide thin film transistors was feasible,high efficiency,and low cost for batch production that applied in electronic field.

zinc oxidenanoparticlethin film transistorthermal decompositionsemiconductor

杨秋雨、王秀秀、覃斑、李辰砂

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黑龙江大学 化学化工与材料学院,哈尔滨 150080

氧化锌 纳米粒子 薄膜晶体管 热分解 半导体

国家自然科学基金黑龙江省自然科学基金联合引导项目

61275117LH2020E106

2024

黑龙江大学工程学报
黑龙江大学

黑龙江大学工程学报

影响因子:0.358
ISSN:2095-008X
年,卷(期):2024.15(1)
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