纳米氧化锌粒子薄膜的场效应载流子迁移率特性的研究
Field-effect mobility property of synthesized zinc oxide nanoparticles thin film
杨秋雨 1王秀秀 1覃斑 1李辰砂1
作者信息
- 1. 黑龙江大学 化学化工与材料学院,哈尔滨 150080
- 折叠
摘要
将纳米氧化锌粒子制备纳米膜,研究其场效应性能与载流子迁移性能.通过在有机溶剂介质中热分解油酸锌配合物,合成出尺寸均匀的六方相氧化锌纳米晶粒子.以沉积了铝钛氧化物层与铟锡氧化物层的玻璃为载体,通过旋涂工艺将纳米氧化锌粒子涂覆于其表面,制备出场效应薄膜晶体管.通过工艺优化,制成的半导体纳米氧化锌薄膜晶体管具有优异的可控结构及致密分布的氧化锌纳米晶体,表现出优异的场效应性能与载流子迁移性能.这种直接由氧化锌纳米晶制备的薄膜晶体管具有非毒性、好的透明性以及优越而稳定的场效应半导体器件性能.该技术可高效,便利且低成本大批量地制备氧化锌薄膜晶体管,便于后续在电子等领域的应用.
Abstract
We have synthesized the uniform-sized hexagonal zinc oxide nanoparticles by thermolysis of Zn-oleate complex in organic solvent.By using the ATO/ITO/glass as the substrate,field-effect thin film transistors were fabricated via spin-coating the zinc oxide nanoparticles on ITO layer surface.The thin-film semiconductors of zinc oxide with well-controlled and densely packed nanocrystals,prepared by optimizing fabrication condition,exhibited superior field-effect and carrier mobility.The thin film transistors fabricated by directly using the zinc oxide nanoparticles also demonstrated non-toxic,transparent,and stable field-effect semiconductor performances.This approach of fabricating zinc oxide thin film transistors was feasible,high efficiency,and low cost for batch production that applied in electronic field.
关键词
氧化锌/纳米粒子/薄膜晶体管/热分解/半导体Key words
zinc oxide/nanoparticle/thin film transistor/thermal decomposition/semiconductor引用本文复制引用
基金项目
国家自然科学基金(61275117)
黑龙江省自然科学基金联合引导项目(LH2020E106)
出版年
2024
NETL
NSTL
万方数据