Research on Preparation and Properties of Transparent and Electrical Conductive ZnS/Cu/Ag/ZnS Multilayer Film by Magnetron Sputtering
The ZnS/Cu/Ag/ZnS multilayer transparent conductive film was prepared by magnetron sputtering technique,the corresponding microstructure and optoelectrical properties were analyzed.The targets of ZnS,Cu and Ag with purity>99.99 wt.%were adopted as raw materials,radio frequency power and direct current power were selected to deposit each layer sequentially with varied depth values.The microstructure,phase constituent and optoelectrical properties were studied via the scanning electronic microscope,atom force microscope,X-ray diffractometer,ultraviolet and visible spectrophotometer and four-point probe.The ZnS/Cu/Ag/ZnS film possesses homogeneous morphology,good light transmission and electrical conductivity.The optimal value is 87.47%for the average light transmittance(400-800 nm),6.74 Ω/sq for the sheet resistance and 38.91×10-3Ω-1 for the Figure of Merit.The indium-free composite film with excellent optoelectrical properties offers extra choice for corresponding industrial applications.