Design and Simulation of Micro heater for Coplanar MEMS Gas Sensors
[Purposes]Traditional MEMS gas sensors with membrane and suspension structures have parasitic electric fields in the vertical direction,which can affect the detection of the gas sensors.In or-der to reduce the impact of parasitic electric fields on the performance of gas sensors,a MEMS gas sensor with coplanar structure was proposed,and the micro heater of the gas sensor with coplanar structure was modeled,simulated,and optimized.[Methods]SolidWorks was used to model the MEMS gas sensor with coplanar structure,and finite element analysis(FEA)was used to simulate the micro heater from the as-pects of thermal stability,mechanical stability,etc.[Findings]The finite element simulation results show that the micro heater of the gas sensor with coplanar structure can provide a stable and uniform heat distribution throughout the measurement area of the gas sensor,and can avoid interconnection be-tween the heating electrodes of the micro heater and the measurement electrodes of the gas sensor during high-temperature operation,providing an excellent detection environment for MEMS gas sensors.[Con-clusions]MEMS gas sensors with coplanar structure can effectively reduce the impact of parasitic elec-tric fields in the vertical direction on the performance of gas sensors and simplify the technique pro-cesses of MEMS gas sensors.The simulation results also demonstrate the feasibility of coplanar struc-tures,providing a basis for the design and preparation of actual MEMS gas sensors.
Coplanar structureMEMSgas sensorsmicro heaterfinite element analysis(FEA)
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