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高亮绿光氮化镓基Micro-LED微型显示器制备

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Micro-LED作为一种新型的显示技术,具有对比度高、响应快及寿命长等优点,已成为当前研究的热点.然而,尽管潜力巨大,Micro-LED技术的商业化之路仍面临诸多技术上的挑战与瓶颈.本文旨在探讨高亮绿光氮化镓基 Micro-LED 微型显示器的制备过程及其相关技术.基于 WVGA041 全数字信号电路 CMOS 硅基驱动电路,制作了 0.41 inch、分辨率为 800×480 的主动式单色绿光Micro-LED微型显示器.利用高精度倒装焊接技术实现了CMOS驱动电路与LED发光芯片的电气连接.结果表明,制备出LED显示芯片正常启亮电压为 2.8 V,EL光谱峰值波长 524 nm;在硅基CMOS电路驱动范围内,Micro-LED微型显示器在5 V电压下,器件亮度为108000 cd/m2(最大亮度可达250000 cd/m2),电流密度达到 0.61 A/cm2 时色坐标为(0.175,0.756).当电流密度从 0.3 A/cm2 增加到 1.3 A/cm2时,色坐标从(0.178,0.757)变化到(0.175,0.746),器件的色稳定性能够满足实际应用要求.
Fabrication of GaN-based Micro-LED Green Micro-display with High Brightness
Micro-LEDs are a new display technology with advantages including high contrast,fast response,and long lifetimes.Micro-LEDs are currently regarded as an active topic of research.Micro-LED display technology is a promising industry,but its commercialization faces many technical challenges and bottlenecks.This study explores the diode preparation process and related technologies for high-brightness,green-light,GaN-based micro-LED micro-displays.Monochrome green micro-LEDs with resolutions of 800×480 and 0.41 in were fabricated based on the CMOS driver circuit of an all-digital signal circuit.The CMOS driver circuit was connected to an LED chip via high-precision flip bonding.The experimental results showed that the turn-on voltage of the LED was 2.8 V and that the peak wavelength of the electroluminescence spectrum was 524 nm.The maximum brightness of the device can reach 250,000 cd/m2 within the normal driving range of silicon-based CMOS circuits,and the brightness can reach 108,000 cd/m2 at 5 V.When the current density was controlled at 0.61 A/cm2,the CIE coordinates were(0.175,0.756).When the current density was increased from 0.3 A/cm2 to 1.3 A/cm2,the CIE coordinates changed from(0.178,0.757)to(0.175,0.746).The color stability of the device met the requirements for practical applications.

micro-LEDmicro-displayhigh brightness green emitting diode

张杰、王光华、邓枫、杨文运、高思博、鲁朝宇、孟泽阳、高树雄、常诚、曹坤宇、马赛江、刘颖琪、王丽琼

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云南北方奥雷德光电科技股份有限公司,云南 昆明 650223

昆明物理研究所,云南 昆明 650223

云南大学 材料与能源学院,云南 昆明 650500

micro-LED 微型显示器 高亮单色绿光发光二级管

云南省省市一体化重大科技专项云南省院士专家工作站

202202AH210001202205AF150076

2024

红外技术
昆明物理研究所 中国兵工学会夜视技术专业委员会

红外技术

CSTPCD北大核心
影响因子:0.914
ISSN:1001-8891
年,卷(期):2024.46(10)