A monolithic integrated medium wave Mercury Cadmium Telluride polarimetric focal plane array
A medium wave(MW)640×512(25 μm)Mercury Cadmium Telluride(HgCdTe)polarimetric focal plane array(FPA)was demonstrated.The micro-polarizer array(MPA)has been carefully designed in terms of line grating structure optimization and crosstalk suppression.A monolithic fabrication process with low damage was explored,which was verified to be compatible well with HgCdTe devices.After monolithic integration of MPA,NETD＜9.5 mK was still maintained.Furthermore,to figure out the underlying mechanism that dominat-ed the extinction ratio(ER),specialized MPA layouts were designed,and the crosstalk was experimentally vali-dated as the major source that impacted ER.By expanding opaque regions at pixel edges to 4 μm,crosstalk rates from adjacent pixels could be effectively reduced to approximately 2%,and promising ERs ranging from 17.32 to 27.41 were implemented.
infrared physicsinfrared polarimetric focal plane arraymonolithic integrationMercury Cadmium Tellurideextinction ratio
陈泽基、黄佑文、浦恩祥、肖徽山、徐世春、秦强、孔金丞
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昆明物理研究所 红外探测器中心,云南 昆明 650223
红外物理 红外偏振焦平面阵列 单片集成 碲镉汞 消光比
selffunded project of Kunming Institute of Physics
国家科技期刊平台
NSTL
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