激光声表面波的若干应用研究进展
Progresses in the applications of laser induced surface acoustic waves
沈中华 1石一飞 1严刚 1袁玲 1陆建 1倪晓武1
作者信息
- 1. 南京理工大学,理学院,江苏,南京,210094
- 折叠
摘要
声表面波在其传播过程中能量主要集中在波长量级的表层内,因此主要受固体表层性质影响.而激光激发的声表面波在具有声表面波的一般特点的同时又具有激光超声的非接触、宽带、空间分辨率高等优点,因此可将其应用于表面残余应力检测,薄膜弹性性质表征及表面和亚表面缺陷检测等方面.文章简要地对激光声表面波在这些方面应用的原理及其研究进展情况作一介绍.
Abstract
The energy of the surface acoustic waves (SAWs) concentrates on the surface in the depth of wavelength during its propagation.Laser induced (SAWs) is developed quickly recently because of its advantages of non-contact operation,broad bandwidth,high spatial resolution and so on besides the general characters of SAWs.The principles and progresses in some applications of laser induced surface acoustic waves are introduced briefly in this paper,including detecting residual stress,characterizing the elastic properties of films and detecting of surface and subsurface defects.
关键词
激光声表面波/残余应力/薄膜弹性性质/缺陷Key words
Laser induced surface acoustic waves/Residual stress/Elastic properties of film/Defects引用本文复制引用
基金项目
国家自然科学基金(60208004)
南京理工大学校科研和教改项目(Njust200503)
出版年
2007
NETL
NSTL
维普
万方数据