Recent advances in synthesis and purification of electronic specialty gases for integrated circuits
ESGs(electronic specialty gases)play a critical role in multiple key processes during the manufacturing of integrated circuits.To ensure the electrical performance and yield of the final integrated circuit products,strict requirements are imposed on the purity and consistency of ESGs.However,ESGs come in various types and standards of the types and levels of key impurities,leading to significant variations in the synthesis and purification methods for different ESGs.With a specific focus on high-demand products such as nitrogen trifluoride,tungsten hexafluoride,and hexafluorobutadiene,in the present review the recent progress and common technical issues in synthesis and purification technologies for electronic specialty gases were systematically reviewed and discussed.Then suggestions and perspectives are provided for future development of the electronic specialty gases in the integrated circuit manufacturing process.
国家科技期刊平台
NSTL
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