Optimization of response surface for adsorption and desorption of hydrogen fluoride by sodium fluoride
NaF is a kind of HF adsorbent with high selectivity and adsorption capacity,which is widely used in the purification process of F-Gas(fluorine-containing electron gas).The BBD(Box-Behnken design)in response surface method was used to optimize the process parameters of HF adsorption and desorption,respectively,with temperature,pressure and flow rate as the influencing factors.The mathematical models on HF adsorption and desorption were established.The significance of influence factors and the effects of the interaction of various factors on HF adsorption and desorption were discussed in detail.Finally,the optimum process parameters of HF adsorption and desorption were obtained.The results show that the main factors affecting HF adsorption and desorption are flow rate and temperature,respectively.Furthermore,the maximum adsorption capacity of HF can be up to 512 mg/g with the adsorption temperature of 59 ℃,the adsorption pressure of 0.4 MPa,and the gas flow of 345 mL/min.The maximum HF desorption capacity is 478 mg/g,as the desorption temperature is 348 ℃,the desorption pressure is 0.23 MPa,and the gas flow rate is 400 mL/min.An important reference is provided for parameter optimization of F-Gas purification process.
sodium fluoridehydrogen fluorideresponse surface methodadsorption and desorptionprocess optimization
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