The content of aluminium, niobium, zirconiun, molybdenum, iron and silicon in Ti80 Titanium Alloy was determined by inductively coupled plasma atomic emission spectrometry (ICP-OES).The sample was dissolved with water, Hydrochloric acid, Hydrofluoric acid and Nitric acid mixed acid system (volume ratio 5:5:1∶1).The analysis lines of Aluminium, Niobium, Zirconiun, Molybdenum, Iron and Silicon were 394.401nm, 269.706nm,339.t97nm, 202.03 1 nm, 259.939nm and 288.158nm, respectively.The calibration curve was drawing, linear correlation coefficient of any element were greater than 0.999.The method detection limit was determined, each element detection limit was less than 0.003%.The relative standard deviation of determination results was between in 0.79% and 3.42%(n=7), the recovery rate was from 97.0% to 104.0%.