Research Status of Chemical Mechanical Polishing Solution
Chemical mechanical polishing(CMP)is a kind of ultra-precision machining technology with synergistic effect of chemical corrosion and mechanical grinding.CMP solution is a key part of CMP technology,which plays a vital role in the global planarization processing of materials.The influence of components of chemical mechanical polishing solution on polishing performance is summarized.
chemical mechanical polishing solutioncomponentinfluence research
NETL
NSTL
万方数据
维普
