A Heterogeneous Integrated PDK Based on GaAs and FO-WLP Processes
Three-dimensional heterogeneous integration technology is the most important methodvery importantto realize the development of electronic systems towards miniaturization,high performance,low power consumption and low cost,and it is also a core technology that determines the future development of microelectronic systems.To further promote the research of heterogeneous integration technology,aheterogeneous integration PDK based on GaAs and FO-WLPprocess is proposed by studying the development difficulties and methods of heterogeneous integration PDK.The PDK innovates and supports the 3D heterogeneous integrated process model and its related ADS device units and ADS physical verification files,realizes the design of GaAs heterogeneous packaging circuits on the ADS platform,and verifies the accuracy of the layout and schematic diagram through the ADS platform physical verification tools.
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