基于虚实结合的半导体制造工艺实验教学平台应用
Application of Physical-Virtual Experimental Teaching Platform for Semiconductor Manufacturing Process
商世广 1刘有耀 1金蕾 1刘维红 1苗瑞霞1
作者信息
- 1. 西安邮电大学 电子工程学院,陕西 710121
- 折叠
摘要
阐述虚实结合的实验教学平台设计,将先进材料、半导体工艺、器件仿真工具引入实践教学中,包括课程内容、实验室建设和运行管理.构建一个虚实相结合、课内课外相结合和教学科研相结合的半导体制造工艺实践教学体系.
Abstract
This paper describes the design of an experimental teaching platform that combines virtual and real elements,introducing advanced materials,semiconductor processes,and device simulation tools into practical teaching,including course content,laboratory construction,and operation management.It explores the construction of a semiconductor manufacturing process practical teaching system that combines virtual and real,in class and out of class,and teaching and research.
关键词
实验教学平台/半导体制造工艺/虚实结合/实践教学Key words
experimental teaching platform/semiconductor manufacturing technology/combination of virtual and real/practical teaching引用本文复制引用
出版年
2024
NETL
NSTL
维普
万方数据