摘要
阐述AI技术的发展对集成电路制造行业的宏观影响,分析AI技术对集成电路制造各环节的影响,包括对工艺整合、良率提高、掩膜光刻、蚀刻和清洗、薄膜技术、扩散技术等各个具体生产环节的影响.AI技术的发展对集成电路制造的影响将是革命性的.
Abstract
This paper describes the macro impact of the development of AI technology on the integrated circuit manufacturing industry,analyzes the impact of AI technology on various aspects of integrated circuit manufacturing,including process integration,yield improvement,mask lithography,etching and cleaning,thin film technology,diffusion technology,and other specific production processes.The development of AI technology will have a revolutionary impact on integrated circuit manufacturing.
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