Analysis of Optimizing the Heat Dissipation Capacity of Electrical Cabinets Based on DMAIC Improved Model
This paper describes that the heat dissipation capacity of semiconductor equipment electrical cabinets determines the electrical performance of the equipment,and proposes an optimization process for heat dissipation schemes based on the DMAIC improved model.The simulation and actual measurement results show that by standardizing the design process,quantifying experimental indicators,and optimizing the heat dissipation capacity of the electrical cabinet,the production capacity of the machine is significantly improved.
Integrated circuit manufacturing equipmentelectrical cabinetsheat dissipation capacityDMAIC improvement model
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